Parametric analysis on the design of RF mems series switches
A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches...
Principais autores: | , |
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Formato: | Texto completo |
Idioma: | Inglés |
Publicado em: |
European Scientific Institute
2015
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Assuntos: | |
Acesso em linha: | https://ri.unsam.edu.ar/handle/123456789/780 |
Resumo: | A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches is studied and simplified equations for design propose are evaluated and corrected on the basis of experimental results. |
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