Parametric analysis on the design of RF mems series switches

A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches...

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Détails bibliographiques
Auteurs principaux: Lonac, Julio Andrés, Merletti, Gustavo Ariel
Format: Texto completo
Langue:Inglés
Publié: European Scientific Institute 2015
Sujets:
Accès en ligne:https://ri.unsam.edu.ar/handle/123456789/780
Description
Résumé:A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches is studied and simplified equations for design propose are evaluated and corrected on the basis of experimental results.